Overview
Sponge zirconium target is a high-purity form of zirconium processed into a porous, sponge-like structure for use in physical vapor deposition (PVD) systems. Unlike solid zirconium targets, the sponge morphology enhances thermal stability and deposition uniformity. It is produced via the Kroll process, where zirconium tetrachloride is reduced with magnesium. The resulting sponge is then purified, compacted, and sintered into targets. This material is favored for its cost-effectiveness and adaptability to large-scale coating applications.
Physical and Chemical Properties
Sponge zirconium exhibits exceptional corrosion resistance due to a passive oxide layer that forms spontaneously in air. Its thermal neutron absorption cross-section is low (0.18 barns), making it suitable for nuclear applications. The porous structure provides a high surface area, which improves sputtering efficiency. Typical oxygen content is kept below 500 ppm to prevent brittleness. Mechanical properties include a hardness of ~120 HV and tensile strength of 330 MPa after consolidation.
Main Applications
In semiconductor manufacturing, sponge zirconium targets deposit diffusion barriers for copper interconnects. The optical industry uses them for anti-reflective coatings on lenses due to zirconium's optimal refractive index (2.0 at 550 nm). Decorative applications include wear-resistant coatings for watches and jewelry. Emerging uses include solid oxide fuel cell components and superconducting films. Nuclear reactors employ zirconium targets for cladding material research.
Safety and Storage
Zirconium sponge is pyrophoric when finely divided. Store bulk material under argon or nitrogen to prevent spontaneous combustion. Grounding is essential during handling to avoid static discharge ignition. For machining, use wet methods to suppress dust formation. Class D fire extinguishers (e.g., sodium chloride) must be available. Waste disposal must comply with local regulations for reactive metals.
B2B Procurement Guide
When sourcing sponge zirconium targets, prioritize suppliers with ISO 9001 certification and traceable material documentation. Key specifications to verify include: purity (≥99.5% Zr), oxygen content (<500 ppm), and density (≥90% theoretical). Request performance data such as deposition rate and film uniformity. For large orders, consider on-site audits of the supplier's sintering facilities. Lead times typically range 4-8 weeks for custom sizes. MOQs often start at 5 kg for high-purity grades.
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