Vanadium-Titanium Alloy Sputtering Target
Overview
Vanadium-Titanium Alloy Sputtering Target is a high-performance material designed for physical vapor deposition (PVD) processes. The alloy combines vanadium's strength and titanium's corrosion resistance, making it ideal for producing thin films with enhanced durability and conductivity. Manufactured through vacuum melting and precision machining, these targets exhibit consistent composition and minimal impurities. They are available in standard sizes (e.g., 2-8 inch diameters) or custom geometries to fit specific sputtering systems. The material is particularly valued in advanced industries requiring precise film stoichiometry.
Physical and Chemical Properties
The alloy typically contains 30-70% vanadium, balancing mechanical strength and oxidation resistance. Its density ranges between 4.4-4.8 g/cm³, with thermal conductivity of ~15 W/m·K, ensuring efficient heat dissipation during sputtering. Key characteristics include low oxygen content (<500 ppm), fine grain structure (ASTM 6-8), and Vickers hardness of 200-300 HV. The material maintains stability under high-vacuum conditions and resists delamination during high-power deposition processes. Electrical resistivity is approximately 50-80 μΩ·cm, suitable for conductive coatings.
Main Applications
Primary use is in semiconductor fabrication for diffusion barriers and interconnect layers. The alloy's high melting point makes it suitable for high-temperature MEMS devices. In aerospace, it deposits wear-resistant coatings on turbine blades. Optical applications include anti-reflective films for solar panels and IR windows. Decorative coatings leverage its metallic luster and tarnish resistance. Emerging uses encompass lithium-ion battery electrodes and smart glass technologies.
Safety and Storage
Although stable in solid form, machining generates fine metallic dust requiring NIOSH-approved respirators. Store in argon-filled containers to prevent surface oxidation. Handle with clean gloves to avoid contamination. Secondary containment is recommended for large targets to prevent edge chipping. Disposal follows local metal recycling regulations. Emergency procedures for dust exposure include eye flushing and medical evaluation for respiratory symptoms.
B2B Procurement Guide
Specify alloy ratio (e.g., V50Ti50), purity (3N5 or 4N), and dimensions (±0.1mm tolerance). Request certification with composition analysis and ultrasonic testing reports. Lead time varies from 4-12 weeks for custom orders. Bulk purchases (50+ kg) may qualify for 10-15% discounts. Evaluate suppliers' capability to provide bonding services (e.g., copper backing plates). For R&D, consider smaller 1-2 inch targets for process optimization before full-scale production.
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