ULVAC Screw Pump

Updated: 2026-07-15

Overview

The ULVAC Screw Pump is a state-of-the-art vacuum pump designed for demanding industrial and scientific applications. It leverages screw rotor technology to achieve high pumping speeds and low ultimate pressure levels. This pump is particularly valued in industries where oil-free and clean vacuum environments are critical, such as semiconductor manufacturing and analytical instrumentation. The ULVAC Screw Pump is known for its robust construction and long service life. It is engineered to minimize vibration and noise, making it suitable for use in noise-sensitive environments. The pump's oil-free operation eliminates the risk of contamination, which is a significant advantage in processes requiring high purity.

Structure and Working Principle

The ULVAC Screw Pump consists of two intermeshing screw rotors that rotate in opposite directions within a precisely machined chamber. As the rotors turn, gas is trapped and compressed between the rotor threads and the chamber wall, moving it from the inlet to the outlet side. This mechanism allows for continuous and efficient gas evacuation. The pump's design ensures minimal internal leakage and high compression ratios, enabling it to achieve low ultimate pressures. The absence of oil or other lubricants in the pumping chamber means there is no risk of backstreaming or contamination, making it ideal for clean vacuum applications.

Key Features

One of the standout features of the ULVAC Screw Pump is its oil-free operation, which ensures a clean and contamination-free vacuum environment. This is particularly important in industries like semiconductor manufacturing, where even trace contaminants can compromise product quality. The pump also boasts low vibration and noise levels, making it suitable for laboratory and production environments where quiet operation is essential. Additionally, its robust construction and high-quality materials contribute to its durability and long service life, reducing the total cost of ownership.

Application Areas

The ULVAC Screw Pump is widely used in semiconductor fabrication, where it provides reliable vacuum conditions for processes such as etching, deposition, and ion implantation. Its clean operation makes it indispensable in these high-precision applications. Other common uses include analytical instrumentation, such as mass spectrometers and electron microscopes, where maintaining a high vacuum is critical. The pump is also employed in vacuum coating processes, where it helps achieve uniform and defect-free thin films.

Maintenance and Precautions

Regular maintenance is essential to ensure the optimal performance and longevity of the ULVAC Screw Pump. This includes periodic inspection of the rotors and bearings, as well as cleaning the pump internals to remove any accumulated debris. It is important to avoid exposing the pump to corrosive gases or particulate matter, as these can damage the internal components. Proper filtration and gas handling systems should be in place to protect the pump from harmful contaminants.

B2B Procurement Guide

When procuring a ULVAC Screw Pump, it is crucial to consider the specific requirements of your application. Key factors include the required pumping speed, ultimate vacuum level, and compatibility with the gases used in your process. It is also advisable to consult with the manufacturer or a trusted supplier to ensure you select the right model for your needs. Additionally, consider the availability of spare parts and after-sales support, as these can significantly impact the pump's total cost of ownership.