Overview
High-purity yttrium rectangular targets are precision-engineered materials designed for physical vapor deposition (PVD) systems. These targets typically exceed 99.9% purity to minimize contamination during thin-film deposition processes. The rectangular geometry offers efficient utilization in industrial sputtering systems, particularly for coating large-area substrates. Manufactured through advanced powder metallurgy or vacuum melting techniques, yttrium targets maintain strict dimensional tolerances (±0.5mm) and surface flatness requirements. They serve as essential components in producing yttrium-containing thin films with controlled stoichiometry for specialized applications.
Physical and Chemical Properties
Yttrium targets exhibit unique physical characteristics including a hexagonal close-packed crystal structure at room temperature, which transitions to body-centered cubic at high temperatures. This property affects the sputtering yield and film growth characteristics. The material's moderate sputtering rate (approximately 0.8-1.2 nm/s at standard conditions) makes it suitable for controlled deposition processes. Chemically, yttrium demonstrates high reactivity with oxygen and nitrogen, necessitating careful handling under inert atmospheres. Its thermal expansion coefficient (10.6×10⁻⁶/K) and electrical resistivity (596 nΩ·m) are critical parameters for bonding to backing plates and maintaining stable discharge during sputtering operations.
Main Applications
In semiconductor fabrication, yttrium targets deposit diffusion barrier layers and gate dielectrics, particularly in advanced memory devices. The films provide excellent interface stability with silicon substrates. Optical coating applications utilize yttrium's high refractive index (1.93 at 550nm) for anti-reflection coatings and laser components. Research institutions employ these targets for depositing superconducting films (YBCO) and thermoelectric materials. Emerging applications include protective coatings for aerospace components and corrosion-resistant layers for nuclear reactor materials, leveraging yttrium's exceptional stability in harsh environments.
Safety and Storage
Yttrium targets require careful handling due to their pyrophoric nature when finely divided. Intact targets should be stored in vacuum-sealed packages with desiccant to prevent surface oxidation. Work areas should maintain oxygen levels below 50 ppm during target installation in sputtering systems. Personal protective equipment including anti-static gloves and safety goggles is mandatory during handling. Spent targets should be properly recycled through specialized metal recovery facilities due to yttrium's classification as a rare earth element with environmental considerations.
B2B Procurement Guide
Industrial buyers should specify target dimensions (common sizes range from 50×200mm to 150×500mm), thickness (typically 3-10mm), and bonding requirements (indium, silver epoxy, or mechanical clamping). Certification documents should include glow discharge mass spectrometry (GDMS) analysis reports for impurity content. Lead times for custom targets average 6-8 weeks due to complex manufacturing processes. Consider suppliers with ISO 9001-certified production facilities and request sample deposition test reports. For high-volume procurement (>100kg/year), negotiate bulk pricing and establish quality acceptance protocols for lot consistency.
Related Manufacturers
- 主营：5N锰颗粒、钛酸锶衬底、石墨粉末、五氧化二铌矩形靶、铝钪合金靶材、高纯银颗粒、高纯铪颗粒、氧化锌铝靶材、高纯钛片、ITO靶材、导电氮化硼坩埚、球形粉末、球形铜粉、镀金硅片、钕颗粒、晶振片、键合金丝
- 主营：氧化铋、金属铟锭、液态金属、高纯碲块、铋靶材、金属铟、金属锗、二氧化碲、真空镀膜、铋粉、碲化铋棒材、低熔点合金、碲粒、铟粒、铋珠铋粒、镓铟锡合金、锗粉、铟丝、铟片铟箔、三氧化二铋、碲化铋、铟珠铟粒、低熔点焊料、铋锭
- 主营：氧化铝陶瓷、氧化锆陶瓷、工业陶瓷、溅射靶材、钛靶材、镍靶材、ITO靶材、99氧化铝陶瓷、蒸发材料、镀膜材料、耐高温陶瓷、铝塑膜、坩埚、陶瓷板、铝型材、绝缘陶瓷、铜背板、包装膜、防静电陶瓷、石墨坩埚、陶瓷垫圈、陶瓷零件、可加工陶瓷、微晶玻璃陶瓷
- 主营：镍法兰、镍坩埚、镍铜棒、高纯镍板、高纯镍管、镍弯头、ta2钛卷、ta1钛棒、镍板能、换热管、镍卷带、钛卷带、镍圆棒、n6镍螺丝、n4镍管件、n4镍合金、n5厚壁管、钛合金环、电解镍板、镍基焊丝、电镀镍板、纯镍管件、超细镍丝、镍合金棒、钛合金管
- 主营：钛板、ta10钛板、ta4gr4钛板、钛靶材、钛弯头、钛封头、钛法兰、钛环、钛管板、钛无缝管、钛箔、钛焊管、钛棒、钛丝、钛网、钛螺丝、钛盘管、钛换热器、钛种板、tc4钛板、tc4钛管、钛带、钛复合板、锆板、锆棒
- 主营：合金靶材、陶瓷靶材、金属靶材、高纯合金靶材、铜靶材、银靶材、铝靶材、锂靶材、高纯银靶材、镍铜合金靶材、铬靶材、锆靶材、氧化铟镓锌靶材、铱靶材、铂靶材、硫酸钠靶材、二氧化硅靶材、氧化镁靶材、钛铌合金靶材、钼钽合金靶材、碲化锑靶材、单质金属靶、溅射靶
- 主营：钽板、钽管、钽棒、钽靶材、铌靶材、钒靶材、钽丝、铌板、铌管、铌棒、钽加工件、铌丝、铌加工件、钒板、钒棒、钒丝、钽坩埚、钽接地环、钽保护管、钽箔、铌坩埚、铌箔、钒箔、钽异形件
- 主营：钨镍铁 钨镍铜、热处理工装料架、真空炉组件、高纯钨钼、玻璃窑炉钼电极、钨钼锆钛坩埚、钨钼电极棒、钼顶头、钨钼流口、钨钼钽铌锆钛各类加工件、钼加热带隔热屏、钨丝钼丝、热电偶保护管、TZM合金、钼加热丝、钨网发热体、钼镧合金管、镧钨合金
- 主营：纯铂丝、铂片、铂金坩埚、高纯铱金颗粒、铂扁丝、铂管、铂网、铂铱丝、铂铱合金棒、铱丝、铑丝、铂铑丝、铱铑丝、纯镍丝、康铜丝、锰铜丝、镍铬丝、电炉丝、电阻带、镍铝丝、铝锶合金、铝硅合金、铝钛合金、铝锆合金、铜磷合金、铜铬合金
- 主营：热电偶、补偿导线、高温线、铑靶材、贵金属
- 主营：高纯五氧化三钛、氧化铬绿
- 主营：高纯锡粒、锡渣回收、锡回收、锡条回收
- 主营：合成树脂、固化剂、不饱和树脂、氟化钇、环氧树脂、聚酯多元醇、酚醛树脂、医药中间体
- 主营：氧化钇靶材、高温镍基合金、哈市合金、蒙乃尔合金
- 主营：硼化锆、氟化镁、硒化锌、fto靶材、钐靶材、硒靶材、铝靶材、钆靶材、铽靶材、钇靶材、钼靶材、铬靶材、镉靶材、钽靶材、镍靶材、钨靶材、铑靶材、铒靶材、铪靶材、锑靶材、氟化镱、砷化镓、硒化锑、碲化镉、碲粉末
- 主营：溅射靶材、合金靶材、高纯材料、特殊合金、试样加工