High Density Titanium Nitride Target

Updated: 2026-08-05

Overview

High-density titanium nitride (TiN) sputtering targets are critical materials in physical vapor deposition (PVD) systems, enabling the production of ultra-thin, wear-resistant coatings. TiN's combination of mechanical robustness and aesthetic appeal (golden hue) has made it a benchmark material for industrial and decorative applications. The high-density variant minimizes porosity, ensuring uniform coating performance and extended target lifespan. Manufactured via hot pressing or HIP (Hot Isostatic Pressing), these targets typically achieve >99% theoretical density. They are available in various shapes (e.g., planar, rotary) and sizes, often bonded to copper or aluminum backing plates for thermal management during sputtering.

Physical and Chemical Properties

TiN exhibits a cubic crystal structure (NaCl-type) with exceptional thermal stability up to 600°C in air. Its Vickers hardness of ~2,000 HV surpasses most steels, while its coefficient of friction (0.4–0.6 against steel) enhances tool life. The material's electrical resistivity ranges from 20–70 μΩ·cm, making it suitable for semiconductor applications. Chemically, TiN is inert to most solvents but may react with hydrofluoric acid or molten alkalis. Its optical properties include high infrared reflectivity and the characteristic gold color (due to plasmon absorption at ~450 nm), which is exploited in decorative coatings.

Main Applications

1. **Tool Coatings**: TiN extends the lifespan of drill bits, milling cutters, and injection molds by reducing abrasive wear. 2. **Medical Devices**: Biocompatible TiN coatings improve wear resistance of joint replacements and surgical tools. 3. **Semiconductors**: Acts as a diffusion barrier in microelectronics (e.g., DRAM, CMOS devices). 4. **Decorative Finishes**: Provides scratch-resistant gold-toned surfaces for watches, automotive trims, and architectural glass. Emerging uses include solar absorbers (via TiAlN multilayer stacks) and corrosion-resistant coatings for marine components. The aerospace sector employs TiN for turbine blade coatings due to its oxidation resistance at elevated temperatures.

Safety and Storage

While solid TiN targets pose minimal hazard, machining (e.g., cutting, grinding) generates fine dust that may irritate respiratory systems. Work areas should employ local exhaust ventilation, and operators must wear NIOSH-approved N95 masks. Store targets in vacuum-sealed bags with desiccants to prevent oxidation; argon-filled containers are ideal for long-term storage. Disposal should follow local regulations for non-hazardous ceramics. Avoid exposing used targets to moisture to prevent hydrolysis reactions that could release trace ammonia. For bonded targets, consult the MSDS of bonding materials (e.g., indium solder alloys may contain lead).

B2B Procurement Guide

Industrial buyers should prioritize: 1. **Density Verification**: Request certification showing ≥99% theoretical density (measured via Archimedes' method). 2. **Purity Analysis**: ICP-MS reports confirming ≤0.1% metallic impurities (especially oxygen and carbon). 3. **Geometric Tolerance**: ±0.05 mm flatness for planar targets to ensure plasma uniformity. Consider customized bonding solutions (e.g., copper-backed targets for better heat dissipation in high-power sputtering). Lead times for specialty sizes may exceed 8 weeks. For cost optimization, explore recycled target programs offered by some manufacturers, where used targets are refurbished and recoated.