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Diffusion Pump Fluid

Updated: 2026-08-16

Overview

Steam diffusion pump lubricant is a specialized oil designed for use in diffusion pumps, which are critical for creating high vacuums in industrial and laboratory environments. These lubricants are formulated to withstand the high temperatures and low pressures encountered in diffusion pumps, ensuring efficient and reliable operation. Unlike conventional lubricants, steam diffusion pump oils must exhibit low vapor pressure and high thermal stability to prevent contamination of the vacuum chamber. They are commonly used in semiconductor manufacturing, thin-film coating, and scientific research where maintaining a clean and stable vacuum is essential.

Physical and Chemical Properties

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Steam diffusion pump lubricants are typically clear to pale yellow liquids with a density ranging from 0.85 to 0.95 g/cm³. They possess high boiling points, often exceeding 200°C, which is crucial for their performance in high-temperature vacuum environments. These lubricants are insoluble in water but soluble in various organic solvents. Their low vapor pressure minimizes the risk of backstreaming into the vacuum chamber, a common issue with inferior lubricants. Additionally, they exhibit excellent lubricity, reducing wear and tear on pump components.

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Main Applications

The primary application of steam diffusion pump lubricants is in diffusion pumps, which are widely used in industries requiring high vacuums. Semiconductor manufacturing relies on these pumps for processes like ion implantation and thin-film deposition. Other applications include coating processes, such as physical vapor deposition (PVD) and chemical vapor deposition (CVD), where maintaining a contaminant-free vacuum is critical. Research laboratories also use these lubricants in analytical instruments like electron microscopes and mass spectrometers.

Safety and Storage

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Steam diffusion pump lubricants should be handled with care to avoid inhalation or skin contact. Always use them in well-ventilated areas and wear appropriate personal protective equipment (PPE), such as gloves and safety goggles. Storage conditions are equally important. These lubricants should be kept in a cool, dry place away from direct sunlight to prevent degradation. Ensure containers are tightly sealed to avoid contamination and evaporation.

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B2B Procurement Guide

When procuring steam diffusion pump lubricants, it is essential to consider compatibility with your specific pump model. Check the manufacturer's recommendations to avoid damage or reduced performance. Look for lubricants that meet industry standards, such as ISO certifications, to ensure quality and reliability. Pricing varies based on purity and brand, with reference prices typically ranging from $50 to $200 per liter. Bulk purchases may offer cost savings, but always verify shelf life and storage requirements.

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