Overview
CF gaskets are critical sealing components designed for ConFlat (CF) flanges, widely used in high-vacuum and ultra-high-vacuum (UHV) systems. These flanges employ a copper gasket compressed between two knife-edged metal surfaces, creating a hermetic seal. The CF gasket's design ensures minimal gas permeation, making it indispensable in industries like semiconductor manufacturing, aerospace, and particle accelerators. Originally developed for scientific applications, CF gaskets now feature in commercial equipment due to their reliability. They are standardized under ISO 3669 and ASTM F37, ensuring interoperability across global suppliers. Their ability to withstand temperatures from cryogenic to 450°C further expands their utility.
Structure and Working Principle
A CF gasket typically consists of a soft metal (e.g., oxygen-free copper) or polymer ring that deforms under flange compression. The flange's knife-edge bites into the gasket, creating a metal-to-metal seal. This deformation fills microscopic surface imperfections, preventing leaks even at pressures below 10⁻⁹ mbar. Polymer variants like PTFE or graphite-infused gaskets cater to corrosive environments but may have lower temperature limits. The gasket's cross-section is often trapezoidal to align with the flange's angled groove, ensuring uniform pressure distribution. Proper torque during installation is critical to avoid under- or over-compression, which can compromise sealing performance.
Key Features
CF gaskets excel in extreme conditions: they resist outgassing (critical for vacuum integrity), thermal cycling, and chemical attack from aggressive media like plasmas or acids. Copper gasksets offer superior conductivity, while PTFE versions provide inertness to solvents. Their reusability is limited—copper gaskets often require replacement after disassembly due to work hardening. Some designs incorporate nickel plating to enhance durability. For UHV systems, electropolished surfaces and ASTM F37 certification ensure compliance with leakage rates below 10⁻¹² mbar·L/s.
Application Areas
Primary applications include semiconductor fabrication tools (e.g., etching chambers), synchrotrons, and space simulation chambers. In the energy sector, they seal hydrogen fuel cells and nuclear fusion devices. CF gaskets also feature in analytical instruments like mass spectrometers and electron microscopes, where maintaining vacuum integrity is paramount. Emerging uses include quantum computing setups and photolithography equipment, driven by advancements in material science enabling thinner, higher-purity gaskets.
Maintenance and Precautions
Inspect gaskets for scratches or oxidation before installation. Copper gaskets should be annealed if reused, though replacement is recommended. Use alignment tools to prevent misplacement during flange assembly. Avoid lubricants unless specified—some applications require dry seals to prevent contamination. For polymer gaskets, verify temperature limits; PTFE degrades above 260°C. Regularly monitor torque values in dynamic systems to detect loosening from thermal cycling.
B2B Procurement Guide
Specify flange size (e.g., CF 2.75"), material, and certifications (e.g., ASTM F37). Bulk orders of copper gaskets may cost 20–30% less per unit. For custom shapes, lead times can extend to 4–6 weeks. Evaluate suppliers for vacuum testing capabilities and batch traceability. Emerging markets like China offer cost-competitive options, but validate material purity—impurities can cause outgassing. Consider hybrid gaskets (e.g., copper-clad stainless steel) for applications requiring both strength and conductivity.
Related Manufacturers
- 主营：密封垫片、无石棉密封垫片、金属缠绕垫片、齿型垫片、八角垫片、四氟垫片、石墨垫片、无石棉密封材料
- 主营：POK、聚酮、POK M330A、电池垫片、POK M330F、POK M630A、POK M630F、PA66、POM
- 主营：无氧铜垫片、电池设备、真空泵、仪器仪表
- 主营：导电pok、pok聚酮树脂、高流动耐磨pok、电池垫片、韩国晓星POK、POK回收、POK M330A、韩国晓星M630、韩国晓星M730、韩国晓星E700、韩国晓星M640、韩国晓星M330F、韩国晓星M410、韩国晓星M330FS、韩国晓星M630F、pok改性材料、pok工程塑料、韩国晓星聚酮树脂、POK M33FG3、POK M730F、POK M710F、POK M330FS、韩国晓星pok原料、POK导电、POK加纤、POK改性塑料
- 主营：真空馈通、真空连接器、真空电极、CF密封片、真空润滑脂、真空泵、真空线缆、真空插针、真空贯穿件、低温真空脂、真空泵油
- 主营：法兰挂钩、真空止回阀、手动气动蝶阀、CF垫片、铝双边卡钩螺栓
- 主营：耐液压油、运动护具、建筑板材、表面电阻、包装材料、工程塑胶、注射器部件、轴承导轨料、家电外壳用、输液器部件、弹簧部件料、碳纤维填充、工业齿轮箱、穿戴设备料、管道阀门料、汽车内饰料、高刚性·结构、电子电器外壳、汽车引擎部件、塑胶原料颗粒、工业设备外壳、餐具注塑原料、精密仪器外壳料、化工设备防腐料、化工泵部件原料
- 主营：POK M330A、POK M630A、耐腐蚀塑胶、导电JH900CFST、POK加纤
- 主营：复合板、series500、密封件、3510垫片、ptfe垫片、包覆垫片、石墨垫片、焊接垫片、板状垫片、四氟垫片、密封垫、橡胶板、thermblock、series1000、valqua6500、valqua6503、改性ptfe、valquagf300、valqua7gp66、valquamf300、valquavf-35e、valqua7gs62a、valqua7gs64n、valqua7gs66a、tombono.1200
- 主营：取压短管、卡套球阀、避雷墩、无氧铜垫片、防雷墩支架、PVC防雷支架、TPO避雷墩支座、三防灯、母线槽、彩钢桥架、等电位联接箱、防爆灯、玻璃钢复合桥架、小品灯、三阀组、终端接头、升降灯具、取样短管、卡套接头、护线套管、气源分配器、航空障碍灯、太阳能杀虫灯、网络网格桥架、模压模锻阀门、冷凝容器
- 主营：防雷墩、穿线盒、阻燃灯、CF镀银无氧铜垫圈铜垫、壁装灯、仪表阀、j23w-320p、金卤灯、三防灯、管接头、卡套角、应急灯、照明灯、道路灯、投光灯、j61焊接、端子板、避雷带、疏水器、截止阀、机旁盒、荧光灯、管螺纹、隧道灯、五阀组、母线槽
- 主营：针型阀、真空快装接头快拧接头、压垫终端接头中间接头、CF超真空无氧铜垫片、直行联接头热电偶接头
- 主营：日本岩田涡旋干泵、普发分子泵、普发真空计、普发检漏仪、安捷伦离子泵、爱德华涡旋干泵、爱德华分子泵、真空泵维修保养、检漏仪、控制仪、旋片泵、放气阀、真空泵、震荡包、真空规、密封条、润滑脂、插板阀、密封套件、真空闸阀、真空接头、更换轴承、真空管件、岩田真空泵、日本岩田真空泵
- 主营：重建机、尿素泵、缸头盖、多层密封垫片、喷油器、气缸套、电脑板、矿用车、摇臂瓦、履带板、冷却器、起重机、润滑油、m11油嘴、海水泵、挖机k19、k19缸垫、节温器、风扇轴、门挺杆、ntc油泵、k50缸盖、柔性管、发动机、装载机、k50水泵
- 主营：发动机、密封垫、安装工具、包覆垫片、纤维垫片、通用垫片、膨体四氟垫片、负载阀体垫片、嵌件纯石墨垫片、密封板材、防火套管、密封材料、盘根取出器、reinz无石棉板、软木橡胶密封、无石棉密封板、软木降噪减震块